Tribology Issues and Opportunities in MEMS Viola Eckelt This was the seventh gathering

This was the seventh gathering of a biennal meeting born from a cooperation agreement between US and Italian academic and research institutions

Konzeption und Implementierung eines ersten Prototypen

vii This book sets out to explain the New Contract

nämlich solche Entwicklungsprozesse moderierend zu begleiten und gleichzeitig die BürgerInnen in ihrer Selbstorganisation zu unterstützen

zum Türken mit

Tribology Issues and Opportunities in MEMS Viola Eckelt This was the seventh gatheringMicro Electro Mechanical Systems (MEMS) is already about a billion dollars a year industry and is growing rapidly. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surfacechemistry and materials science in the operationand manufacturingof many MEMS devices and these issues are preventing an even faster commercialization. Very little is understood about